Arunkumar Subramanian, PhD
Associate Professor
Department of Mechanical and Industrial Engineering
Contact
Building & Room:
3003A ERF
Address:
842 West Taylor Street, MC 251, Chicago, IL 60607
Office Phone:
Email:
About
Research Interests:
Chip manufacturing
Single-digit nanometer lithography
AI-enabled autonomous synthesis and manufacturing
Atomic-to-nanoscale microscopy using electrons and scanning probes
Multi-physics characterization of nano-systems
Education
Ph.D., Mechanical Engineering
Swiss Federal Institute of Technology (ETH Zurich), 2008
M.S., Mechanical Engineering
University of Minnesota, 2003
B.E. (Hons.), Mechanical Engineering
Birla Institute of Technology & Science (Pilani), India, 1999
B.E. (Hons.), Electrical Engineering
Birla Institute of Technology & Science (Pilani), India, 1999