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Photo of Lilley, Carmen

Carmen Lilley, PhD

Associate Professor

Department of Mechanical and Industrial Engineering


Building & Room:

3031 ERF


842 West Taylor Street, MC 251, Chicago, IL 60607

Office Phone:



Laboratory: Nanoscale Materials Science and Engineering

Research Interests:

Professor Lilley’s research interests are focused on fabrication of nanoscale materials and characterization and modeling of material properties at the nanoscale. Her research on nanomanufacturing and fabrication has focused on self assembly of nanowire and nanoislands with e-beam evaporation in ultra high vacuum systems. Her characterization and modeling research includes electrical, mechanical, failure and reliability modeling of nanoscale materials. The application of her work is to fabricate nanoscale material systems with engineered properties.


Ph.D., Theoretical and Applied Mechanics
Northwestern University, 2003

B.S., General Engineering
University of Illinois at Urbana-Champaign, 1998